微电子工艺实验室

Microelectronic Technology Laboratory

随着半导体制造技术进步，人们不断将半导体元器件和其它元件小型化并集成到衬底或线路板上，所构成的电路称为集成电路。这种设计、制造微小型电子元器件和电路以实现电子系统功能的新型技术就是微电子工艺技术。目前，运用微电子工艺技术制造的集成电路、半导体器件广泛应用于计算机芯片、生物芯片、人脑芯片和其它智慧检测环境，是当今人类智慧生活的灵魂。

本实验室能够完成硅片上的氧化、光刻、扩散等芯片制备的一系列半导体平面工艺基本工艺流程，并结合金属化工艺过程进而实现微小型半导体器件的制作；能够实现半导体气敏、湿敏、光敏等半导体元器件的制作；能够完成各类半导体器件的特性测试及分析。

本实验室属于电子科学与技术专业实验室，主要用于电子科学与技术专业相关课程的实验教学任务，同时承担与微电子工艺方向相关的实训、实践任务。实验室可作为本科生、研究生的大学生创新训练和大赛的实践基地，也为本专业教师提供了必要的科学研究实验环境。

主要实验设备、仪器和实验装置有：光刻机、程控扩散炉、真空镀膜机、晶圆探针台、超净工作台、去离子水设备、耐强酸碱通风橱、测量显微镜、烘箱、PN结温度特性测试仪、单晶少子寿命测试仪、四探针测试仪、半导体特性图示仪、晶闸管伏安特性测试仪、晶闸管关断时间测试仪等，总价约167万元。

本实验室开设课程和专业方向有：固体物理与半导体物理，微电子器件原理，集成电路工艺，固态电子元器件，电子产品工艺，RF-MEMS原理及应用，物理光学，量子力学等。

With the development of semiconductor manufacturing technology, semiconductor components and other components are increasingly miniaturized and integrated into substrates or circuit boards, and the circuit formed is called the integrated circuit. This new technology of the design and manufacture for the microminiature electronic components and circuits to achieve the function of the electronic system is microelectronic technology. At present, the integrated circuit semiconductor devices made by microelectronic technology are widely used in computer chips, biological chips, human brain chips and other intelligent detection environments, and it is the soul of the intelligent life of mankind today.

Here, series of basic processes of semiconductor planar technology for the fabrication of chips such as oxidized, photolithography, diffusion on silicon wafers and the fabrication of micro-miniature semiconductor devices by combining with the metallization process can be completed. Also, the fabrication of the semiconductor gas-sensitive, moisture-sensitive, photo-sensitive semiconductor componentsetcand the characteristic testing and analysis of various semiconductor devices can be realized.

This laboratory belongs to the specialty laboratory of the Electronic Science and Technology major, which is mainly used for the experimental teaching tasks for related courses of the Electronic Science and Technology major, and undertakes the practical training tasks related to the direction of microelectronic technology at the same time. The laboratory can be used as an innovation and experimentation practice base for undergraduate and graduate students, and also provides the necessary scientific research and experiment environment for the professional teachers.

Main laboratory equipment instruments and experimental apparatus: lithography, programmed diffusion furnace, vacuum coating equipment, wafer probe station, bechtop, ultrapure water machine, strong acid-alkali ventilation kitchen, measuring microscope, drying oven, temperature characteristic tester for p-n junction, single crystal small particle lifetime tester, four-point probes, semiconductor curve tracer, thyristor volt-ampere characteristic tester, thyristor turn-off time tester, etc., valued at about 1.67 million yuan.

Courses and specialized directions for this laboratory: Solid-state Physics and Semiconductor Physics, Microelectronic Device Principle, Integrated Circuit Process, Solid-state Electronic Components, Electronic Product Process, RF-MEMS Principle and Application, Physical Optics, Quantum Mechanics, etc.